核心提示：當前(qian)精(jing)密和(he)(he)超(chao)精(jing)密加工(gong)精(jing)度從微米到亞微米，乃至納米，在汽(qi)車、家電(dian)、IT電(dian)子信息高技(ji)術領域(yu)和(he)(he)軍用(yong)、民用(yong)工(gong)業有(you)廣泛應用(yong)。同時(shi)，精(jing)密和(he)(he)超(chao)精(jing)密加工(gong)技(ji)術的發(fa)展也促進了機(ji)械、模具、液壓(ya)、電(dian)子、半導體、光學、傳感(gan)器和(he)(he)測量技(ji)術及金屬加工(gong)工(gong)業的發(fa)展。
一、精密和超精密加工的概念與范疇
通常，按加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)精(jing)度(du)劃(hua)分，機械加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)可(ke)分為(wei)一般加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)、精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)、超精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)三個階段。目(mu)前(qian)，精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)是(shi)指加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)精(jing)度(du)為(wei)1~0.1?;m，表面粗糙度(du)為(wei)Ra0.1~0.01?;m的(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)技(ji)術(shu)，但這個界限(xian)是(shi)隨(sui)著加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)技(ji)術(shu)的(de)(de)進(jin)步不斷(duan)變化(hua)的(de)(de)，今天的(de)(de)精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)可(ke)能就是(shi)明天的(de)(de)一般加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)。精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)所要解決的(de)(de)問題，一是(shi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)精(jing)度(du)，包(bao)括(kuo)(kuo)形位公差、尺寸精(jing)度(du)及表面狀況(kuang)；二是(shi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)效(xiao)率，有(you)些加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)可(ke)以(yi)取得較(jiao)好的(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)精(jing)度(du)，卻難(nan)以(yi)取得高的(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)效(xiao)率。精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)包(bao)括(kuo)(kuo)微細(xi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)和超微細(xi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)、光整加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)等加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)技(ji)術(shu)。傳統的(de)(de)精(jing)密(mi)(mi)(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)方法(fa)有(you)砂帶磨削(xue)、精(jing)密(mi)(mi)(mi)切削(xue)、珩磨、精(jing)密(mi)(mi)(mi)研磨與(yu)拋光等。
a. 砂帶(dai)磨(mo)削是用(yong)粘有(you)磨(mo)料(liao)的混(hun)紡布為磨(mo)具對工件(jian)進行加(jia)工，屬于涂(tu)附(fu)磨(mo)具磨(mo)削加(jia)工的范疇，有(you)生產率高、表面質量好、使用(yong)范圍廣等特點。
b. 精密(mi)切削，也稱金(jin)(jin)剛(gang)石刀具切削(SPDT)，用高精密(mi)的機(ji)床和單晶金(jin)(jin)剛(gang)石刀具進行(xing)切削加工，主要(yao)用于銅、鋁等(deng)不宜磨削加工的軟金(jin)(jin)屬的精密(mi)加工，如計算機(ji)用的磁(ci)鼓、磁(ci)盤及大功率激(ji)光(guang)用的金(jin)(jin)屬反(fan)光(guang)鏡(jing)等(deng)，比一般(ban)切削加工精度要(yao)高1~2個等(deng)級。
c. 珩(heng)(heng)磨,用油石砂條(tiao)組成的珩(heng)(heng)磨頭(tou)，在一定壓力下沿工(gong)件表(biao)面往復運動(dong)，加(jia)工(gong)后(hou)的表(biao)面粗糙度可達Ra0.4~0.1?;m，最好可到Ra0.025?;m，主要用來(lai) 加(jia)工(gong)鑄鐵及(ji)鋼，不宜用來(lai)加(jia)工(gong)硬度小、韌性好的有色金屬(shu)。
d. 精密(mi)研(yan)磨(mo)與拋(pao)光(guang) 通(tong)過介于(yu)工(gong)(gong)件和(he)(he)工(gong)(gong)具間的(de)(de)磨(mo)料及(ji)加工(gong)(gong)液，工(gong)(gong)件及(ji)研(yan)具作相(xiang)互機械摩(mo)擦，使工(gong)(gong)件達(da)到(dao)所要求的(de)(de)尺寸(cun)與精度(du)的(de)(de)加工(gong)(gong)方法。精密(mi)研(yan)磨(mo)與拋(pao)光(guang)對于(yu)金屬(shu)和(he)(he)非金屬(shu)工(gong)(gong)件都可以達(da)到(dao)其(qi)他加工(gong)(gong)方法所不能達(da)到(dao)的(de)(de)精度(du)和(he)(he)表面粗糙度(du)，被研(yan)磨(mo)表面的(de)(de)粗糙度(du)Ra≤0.025?;m加工(gong)(gong)變質層很小，表面質量(liang)(liang)高(gao)，精密(mi)研(yan)磨(mo)的(de)(de)設備簡單，主要用于(yu)平(ping)面、圓柱(zhu)面、齒輪齒面及(ji)有密(mi)封要求的(de)(de)配(pei)偶件的(de)(de)加工(gong)(gong)，也可用于(yu)量(liang)(liang)規、量(liang)(liang)塊、噴油嘴(zui)、閥(fa)體與閥(fa)芯的(de)(de)光(guang)整加工(gong)(gong)。
e. 拋(pao)(pao)(pao)(pao)光(guang) 是(shi)利用機械(xie)(xie)、化(hua)學(xue)、電(dian)化(hua)學(xue)的(de)(de)方(fang)法(fa)對工(gong)件(jian)表面(mian)進行的(de)(de)一種微細加(jia)(jia)工(gong)，主要用來降低(di)工(gong)件(jian)表面(mian)粗(cu)(cu)糙度(du)，常用的(de)(de)方(fang)法(fa)有：手工(gong)或(huo)機械(xie)(xie)拋(pao)(pao)(pao)(pao)光(guang)、超聲(sheng)波拋(pao)(pao)(pao)(pao)光(guang)、化(hua)學(xue)拋(pao)(pao)(pao)(pao)光(guang)、電(dian)化(hua)學(xue)拋(pao)(pao)(pao)(pao)光(guang)及(ji)(ji)電(dian)化(hua)學(xue)機械(xie)(xie)復合加(jia)(jia)工(gong)等(deng)。手工(gong)或(huo)機械(xie)(xie)拋(pao)(pao)(pao)(pao)光(guang)加(jia)(jia)工(gong)后工(gong)件(jian)表面(mian)粗(cu)(cu)糙度(du)Ra≤0.05?;m，可(ke)用于(yu)平面(mian)、柱面(mian)、曲面(mian)及(ji)(ji)模具型腔(qiang)的(de)(de)拋(pao)(pao)(pao)(pao)光(guang)加(jia)(jia)工(gong)。超聲(sheng)波拋(pao)(pao)(pao)(pao)光(guang)加(jia)(jia)工(gong)精度(du) 0.01~0.02?;m，表面(mian)粗(cu)(cu)糙度(du)Ra0.1?;m。化(hua)學(xue)拋(pao)(pao)(pao)(pao)光(guang)加(jia)(jia)工(gong)的(de)(de)表面(mian)粗(cu)(cu)糙度(du)一般為Ra≤0.2?;m。電(dian)化(hua)學(xue)拋(pao)(pao)(pao)(pao)光(guang)可(ke)提高到(dao)Ra0.1~0.08?m。
超(chao)精密(mi)加(jia)(jia)(jia)工(gong)就(jiu)是(shi)在超(chao)精密(mi)機(ji)床(chuang)設備上，利用零件與刀具之間產(chan)生的(de)具有嚴格(ge)約束的(de)相對運(yun)動 ，對材(cai)料進(jin)行微(wei)量切削，以獲得極(ji)高形(xing)狀(zhuang)精度和(he)表面光潔度的(de)加(jia)(jia)(jia)工(gong)過程。當前的(de)超(chao)精密(mi)加(jia)(jia)(jia)工(gong)是(shi)指(zhi)被加(jia)(jia)(jia)工(gong)零件的(de)尺寸精度高于(yu)(yu)(yu)0.1μm，表面粗糙(cao)度Ra小(xiao)于(yu)(yu)(yu)0.025μm，以及所用機(ji)床(chuang)定位精度的(de)分辨(bian)率(lv)和(he)重復(fu)性高于(yu)(yu)(yu)0.01μm的(de)加(jia)(jia)(jia)工(gong)技術，亦稱之為亞(ya)微(wei)米(mi)級加(jia)(jia)(jia)工(gong)技術，且正在向納米(mi)級加(jia)(jia)(jia)工(gong)技術發展(zhan)。
超(chao)精(jing)(jing)密(mi)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)包(bao)(bao)括(kuo)微細加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)、超(chao)微細加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)、光整(zheng)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)、精(jing)(jing)整(zheng)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)等加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)(shu)。微細加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)(shu)是(shi)(shi)指(zhi)制(zhi)造微小(xiao)尺(chi)(chi)寸(cun)零件的(de)(de)(de)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)(shu)；超(chao)微細加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)(shu)是(shi)(shi)指(zhi)制(zhi)造超(chao)微小(xiao)尺(chi)(chi)寸(cun)零件的(de)(de)(de)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)(shu)，它們(men)是(shi)(shi)針對(dui)集成電路的(de)(de)(de)制(zhi)造要(yao)求而提(ti)出的(de)(de)(de)，由于尺(chi)(chi)寸(cun)微小(xiao)，其(qi)精(jing)(jing)度(du)(du)(du)是(shi)(shi)用(yong)切除尺(chi)(chi)寸(cun)的(de)(de)(de)絕對(dui)值(zhi)來(lai)表示，而不(bu)是(shi)(shi)用(yong)所加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)尺(chi)(chi)寸(cun)與(yu)尺(chi)(chi)寸(cun)誤差的(de)(de)(de)比值(zhi)來(lai)表示。光整(zheng)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)一(yi)般是(shi)(shi)指(zhi)降(jiang)低表面(mian)粗(cu)糙(cao)度(du)(du)(du)和(he)提(ti)高表面(mian)層(ceng)力學(xue)機(ji)械(xie)性(xing)質的(de)(de)(de)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)方(fang)法，不(bu)著重于提(ti)高加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)精(jing)(jing)度(du)(du)(du)，其(qi)典型加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)方(fang)法有珩磨、研磨、超(chao)精(jing)(jing)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)及無屑加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)等。實際(ji)上(shang)，這些加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)方(fang)法不(bu)僅能(neng)提(ti)高表面(mian)質量，而且可(ke)以提(ti)高加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)精(jing)(jing)度(du)(du)(du)。精(jing)(jing)整(zheng)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)是(shi)(shi)近年來(lai)提(ti)出的(de)(de)(de)一(yi)個(ge)新的(de)(de)(de)名詞術(shu)(shu)語，它與(yu)光整(zheng)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)是(shi)(shi)對(dui)應的(de)(de)(de)，是(shi)(shi)指(zhi)既要(yao)降(jiang)低表面(mian)粗(cu)糙(cao)度(du)(du)(du)和(he)提(ti)高表面(mian)層(ceng)力學(xue)機(ji)械(xie)性(xing)質，又要(yao)提(ti)高加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)精(jing)(jing)度(du)(du)(du)(包(bao)(bao)括(kuo)尺(chi)(chi)寸(cun)、形(xing)狀、位置(zhi)精(jing)(jing)度(du)(du)(du))的(de)(de)(de)加(jia)(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)方(fang)法。
二、精密加工的發展現狀與應用
1.精密成型加工的發展現狀與應用
精(jing)(jing)密(mi)鑄造(zao)(zao)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形、精(jing)(jing)密(mi)模(mo)壓(ya)(ya)(ya)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形、塑(su)(su)(su)性加工(gong)(gong)、薄板精(jing)(jing)密(mi)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形技(ji)術(shu)在工(gong)(gong)業發達國(guo)(guo)家受到高度(du)(du)重視，并投入大量資金(jin)優先發展(zhan)。70年(nian)代(dai)(dai)美國(guo)(guo)空(kong)軍(jun)主持制(zhi)(zhi)訂“鍛造(zao)(zao)工(gong)(gong)藝(yi)(yi)(yi)現(xian)代(dai)(dai)化計(ji)劃”，目的(de)(de)是使(shi)鍛造(zao)(zao)這一重要工(gong)(gong)藝(yi)(yi)(yi)實(shi)現(xian)現(xian)代(dai)(dai)化，更多地使(shi)用(yong)(yong)(yong)(yong)(yong)CAD／CAM，使(shi)新鍛件(jian)(jian)的(de)(de)制(zhi)(zhi)造(zao)(zao)周期減少75%。1992年(nian)，美國(guo)(guo)國(guo)(guo)防部提出(chu)了“軍(jun)用(yong)(yong)(yong)(yong)(yong)關鍵技(ji)術(shu)清單”，其中(zhong)包含了等(deng)壓(ya)(ya)(ya)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)型(xing)工(gong)(gong)藝(yi)(yi)(yi)、數控計(ji)算機控制(zhi)(zhi)旋壓(ya)(ya)(ya)、塑(su)(su)(su)變和(he)剪(jian)切成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形機械(xie)、超(chao)塑(su)(su)(su)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)型(xing)／擴散連接(jie)工(gong)(gong)藝(yi)(yi)(yi)、液壓(ya)(ya)(ya)延(yan)伸成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)型(xing)工(gong)(gong)藝(yi)(yi)(yi)等(deng)精(jing)(jing)密(mi)塑(su)(su)(su)性成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)型(xing)工(gong)(gong)藝(yi)(yi)(yi)。國(guo)(guo)外(wai)近年(nian)來還(huan)發展(zhan)了以航空(kong)航天(tian)產品(pin)為(wei)應(ying)用(yong)(yong)(yong)(yong)(yong)對象的(de)(de)“大型(xing)模(mo)鍛件(jian)(jian)的(de)(de)鍛造(zao)(zao)及(ji)(ji)葉片精(jing)(jing)鍛工(gong)(gong)藝(yi)(yi)(yi)”、“快速凝固粉末層壓(ya)(ya)(ya)工(gong)(gong)藝(yi)(yi)(yi)”、“大型(xing)復(fu)(fu)雜結構件(jian)(jian)強力旋壓(ya)(ya)(ya)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)型(xing)工(gong)(gong)藝(yi)(yi)(yi)”、“難變形材料超(chao)塑(su)(su)(su)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形工(gong)(gong)藝(yi)(yi)(yi)”、“先進材料(如(ru)金(jin)屬基(ji)(ji)復(fu)(fu)合(he)(he)材料、陶瓷基(ji)(ji)復(fu)(fu)合(he)(he)材料等(deng))成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形工(gong)(gong)藝(yi)(yi)(yi)”等(deng)。我(wo)(wo)(wo)國(guo)(guo)的(de)(de)超(chao)塑(su)(su)(su)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形技(ji)術(shu)在航天(tian)航空(kong)及(ji)(ji)機械(xie)行業也有應(ying)用(yong)(yong)(yong)(yong)(yong)，如(ru)航天(tian)工(gong)(gong)業中(zhong)的(de)(de)衛(wei)星(xing)部件(jian)(jian)、導(dao)彈和(he)火箭(jian)氣(qi)瓶等(deng)，采用(yong)(yong)(yong)(yong)(yong)超(chao)塑(su)(su)(su)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形法制(zhi)(zhi)造(zao)(zao)偵察衛(wei)星(xing)的(de)(de)欽(qin)合(he)(he)金(jin)回收艙。與(yu)此同時，還(huan)基(ji)(ji)本上掌握了鋅、銅、鋁、欽(qin)合(he)(he)金(jin)的(de)(de)超(chao)塑(su)(su)(su)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形工(gong)(gong)藝(yi)(yi)(yi)，最小成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形厚度(du)(du)可達0．3mm，形狀也較復(fu)(fu)雜。此外(wai)，國(guo)(guo)外(wai)已廣(guang)泛應(ying)用(yong)(yong)(yong)(yong)(yong)精(jing)(jing)密(mi)模(mo)壓(ya)(ya)(ya)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形技(ji)術(shu)制(zhi)(zhi)造(zao)(zao)武器(qi)。常用(yong)(yong)(yong)(yong)(yong)的(de)(de)精(jing)(jing)密(mi)模(mo)壓(ya)(ya)(ya)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形技(ji)術(shu)，如(ru)閉塞式鍛造(zao)(zao)、采用(yong)(yong)(yong)(yong)(yong)分流原理的(de)(de)精(jing)(jing)密(mi)成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形及(ji)(ji)等(deng)溫成(cheng)(cheng)(cheng)(cheng)(cheng)(cheng)形等(deng)國(guo)(guo)外(wai)已用(yong)(yong)(yong)(yong)(yong)于(yu)軍(jun)工(gong)(gong)生產。目前，精(jing)(jing)密(mi)模(mo)壓(ya)(ya)(ya)技(ji)術(shu)在我(wo)(wo)(wo)國(guo)(guo)應(ying)用(yong)(yong)(yong)(yong)(yong)還(huan)較少，精(jing)(jing)度(du)(du)也較差，國(guo)(guo)外(wai)精(jing)(jing)度(du)(du)為(wei)±0.05—0.10mm，我(wo)(wo)(wo)國(guo)(guo)為(wei)±0.1—0.25mm。
2.孔加工技術的發展現狀及應用
近年來，汽(qi)車、模具零部件、金屬加(jia)工(gong)(gong)大都(dou)(dou)采(cai)用以CNC機床為(wei)中心的(de)生產(chan)形態(tai)，進(jin)行孔(kong)加(jia)工(gong)(gong)時，也大都(dou)(dou)采(cai)用加(jia)工(gong)(gong)中心、CNC電加(jia)工(gong)(gong)機床等先進(jin)設備，高(gao)速、高(gao)精(jing)度(du)鉆削加(jia)工(gong)(gong)已(yi)提上議事(shi)日程。無論哪個領(ling)域的(de)孔(kong)加(jia)工(gong)(gong)，實(shi)現高(gao)精(jing)度(du)和高(gao)速化都(dou)(dou)是取得(de)用戶訂單的(de)重(zhong)要(yao)競爭(zheng)手段。
近年來，隨(sui)著高速(su)銑(xian)削的出現，以銑(xian)削刀具(ju)為中(zhong)心(xin)的切(qie)削加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)正在(zai)(zai)進(jin)入高速(su)高精(jing)度化的加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)時(shi)期。在(zai)(zai)孔加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)作業中(zhong)，目前(qian)仍大量使(shi)用(yong)高速(su)鋼麻花鉆(zhan)(zhan)(zhan)(zhan)，但各企業之(zhi)間在(zai)(zai)孔加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)精(jing)度和(he)(he)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)效率方面已(yi)(yi)逐漸(jian)拉開了(le)差距。高速(su)切(qie)削鉆(zhan)(zhan)(zhan)(zhan)頭(tou)的材料以陶瓷(ci)涂層(ceng)硬(ying)質(zhi)合(he)金(jin)為主，如MAZAK公司和(he)(he)森精(jing)機制作所在(zai)(zai)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)鑄鐵時(shi)，即(ji)采(cai)用(yong)了(le)陶瓷(ci)涂層(ceng)鉆(zhan)(zhan)(zhan)(zhan)頭(tou)。在(zai)(zai)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)鋁合(he)金(jin)等有色材料時(shi)，可(ke)采(cai)用(yong)金(jin)剛(gang)石(shi)(shi)涂層(ceng)硬(ying)質(zhi)合(he)金(jin)鉆(zhan)(zhan)(zhan)(zhan)頭(tou)、DLC涂層(ceng)硬(ying)質(zhi)合(he)金(jin)鉆(zhan)(zhan)(zhan)(zhan)頭(tou)或帶(dai)金(jin)剛(gang)石(shi)(shi)燒(shao)結(jie)體刀齒的鉆(zhan)(zhan)(zhan)(zhan)頭(tou)。高速(su)高精(jing)度孔加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)除采(cai)用(yong)CNC切(qie)削方式對(dui)(dui)孔進(jin)行精(jing)密(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)外，還可(ke)采(cai)用(yong)鏜(tang)削和(he)(he)鉸(jiao)削等方式對(dui)(dui)孔進(jin)行高精(jing)度加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)。隨(sui)著加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)中(zhong)心(xin)主軸的高速(su)化，已(yi)(yi)可(ke)采(cai)用(yong)鏜(tang)削工(gong)(gong)(gong)(gong)具(ju)對(dui)(dui)孔進(jin)行高速(su)精(jing)密(mi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)。
隨(sui)著IT相關產業的(de)(de)發展(zhan)(zhan)，近年來，光學(xue)和電子工(gong)業所用(yong)裝置(zhi)的(de)(de)零部(bu)件產品(pin)的(de)(de)需求急速(su)增(zeng)長，這種(zhong)增(zeng)長刺激(ji)了(le)微細(xi)形狀(zhuang)及(ji)高(gao)精度加(jia)工(gong)技術的(de)(de)迅(xun)速(su)發展(zhan)(zhan)。其(qi)中，微細(xi)孔(kong)加(jia)工(gong)技術的(de)(de)開發應(ying)用(yong)尤其(qi)引人注(zhu)目(mu)。微細(xi)孔(kong)加(jia)工(gong)早已在(zai)(zai)印刷電路板等加(jia)工(gong)中加(jia)以(yi)應(ying)用(yong)，包(bao)括鋼材在(zai)(zai)內的(de)(de)多(duo)種(zhong)被加(jia)工(gong)材料，均可(ke)(ke)用(yong)鉆(zhan)頭進行小直徑(jing)加(jia)工(gong)。目(mu)前，小直徑(jing)孔(kong)加(jia)工(gong)中，利(li)用(yong)鉆(zhan)頭切(qie)削的(de)(de)直徑(jing)最(zui)小可(ke)(ke)至φ50μm左右。小于(yu)φ50μm的(de)(de)孔(kong)則多(duo)采用(yong)電加(jia)工(gong)來完成。為(wei)了(le)抑(yi)制毛(mao)刺的(de)(de)產生，許多(duo)研究者提出可(ke)(ke)采用(yong)超聲波(bo)振動(dong)切(qie)削的(de)(de)方式(shi)。目(mu)前，正在(zai)(zai)探索一種(zhong)應(ying)用(yong)范圍廣(guang)而且工(gong)藝(yi)合理的(de)(de)超聲波(bo)振動(dong)切(qie)削模式(shi)，其(qi)中包(bao)括研究機床的(de)(de)適應(ying)特性等內容。隨(sui)著這些問題的(de)(de)順利(li)解(jie)決，今后可(ke)(ke)望更(geng)好(hao)地實(shi)現(xian)直徑(jing)更(geng)小的(de)(de)微小深孔(kong)加(jia)工(gong)，加(jia)工(gong)精度會更(geng)高(gao)。
3.特種熱處理的發展現狀與應用
特種(zhong)熱(re)(re)處(chu)(chu)理(li)(li)(li)工(gong)(gong)藝是國防工(gong)(gong)業系(xi)統(tong)關鍵制造(zao)技(ji)術之一。真空(kong)(kong)(kong)熱(re)(re)處(chu)(chu)理(li)(li)(li)以其特有的無(wu)污(wu)梁、無(wu)氧(yang)化(hua)、工(gong)(gong)件(jian)(jian)變(bian)形小和適用范圍廣等(deng)優點，廣泛(fan)用于航(hang)空(kong)(kong)(kong)航(hang)天結構(gou)件(jian)(jian)處(chu)(chu)理(li)(li)(li)，如齒輪(lun)結構(gou)件(jian)(jian)表面(mian)滲碳或滲氮，導彈和航(hang)天器各種(zhong)合金或鋼件(jian)(jian)的去應力、增(zeng)強或增(zeng)韌(ren)處(chu)(chu)理(li)(li)(li)等(deng)。典(dian)型結構(gou)如：儀表零件(jian)(jian)、傳動(dong)結構(gou)、燃料(liao)貯(zhu)箱、發動(dong)機(ji)殼體等(deng)；美國熱(re)(re)處(chu)(chu)理(li)(li)(li)爐約有50%以上為真空(kong)(kong)(kong)熱(re)(re)處(chu)(chu)理(li)(li)(li)爐。真空(kong)(kong)(kong)熱(re)(re)處(chu)(chu)理(li)(li)(li)爐已(yi)廣泛(fan)采用了(le)計算(suan)機(ji)控制,目前(qian)已(yi)發展到真空(kong)(kong)(kong)化(hua)學(xue)熱(re)(re)處(chu)(chu)理(li)(li)(li)和真空(kong)(kong)(kong)氣淬(cui)(cui)熱(re)(re)處(chu)(chu)理(li)(li)(li)，包括高(gao)(gao)(gao)(gao)壓(ya)(ya)真空(kong)(kong)(kong)氣淬(cui)(cui)、高(gao)(gao)(gao)(gao)流率真空(kong)(kong)(kong)氣淬(cui)(cui)和高(gao)(gao)(gao)(gao)壓(ya)(ya)高(gao)(gao)(gao)(gao)流率真空(kong)(kong)(kong)氣淬(cui)(cui)技(ji)術等(deng)。另外，激光(guang)熱(re)(re)處(chu)(chu)理(li)(li)(li)技(ji)術在(zai)國外已(yi)廣泛(fan)用于航(hang)空(kong)(kong)(kong)、航(hang)天、電子、儀表等(deng)領域，如各種(zhong)復雜表面(mian)件(jian)(jian)、微型構(gou)件(jian)(jian)、需局部強化(hua)處(chu)(chu)理(li)(li)(li)構(gou)件(jian)(jian)、微型電子器件(jian)(jian)、大(da)規(gui)模集成電路(lu)的生產和修補、精密光(guang)學(xue)元件(jian)(jian)、精密測量元件(jian)(jian)等(deng)。
4.數控電火花加工新工藝的應用
a.標準化夾具
數控(kong)電(dian)(dian)火(huo)花加(jia)工(gong)為保證(zheng)極高的(de)重復定位精度且(qie)不降低加(jia)工(gong)效率(lv)，采用快(kuai)速(su)裝夾(jia)的(de)標(biao)準(zhun)(zhun)化夾(jia)具(ju)。標(biao)準(zhun)(zhun)化夾(jia)具(ju)，是一(yi)種快(kuai)速(su)精密定位的(de)工(gong)藝(yi)方法，它的(de)使(shi)用大大減少了數控(kong)電(dian)(dian)火(huo)花加(jia)工(gong)過(guo)程中(zhong)的(de)裝夾(jia)定位時間，有效地(di)提升(sheng)了企業(ye)的(de)競爭(zheng)力。目前有瑞(rui)士的(de)EROWA和(he)瑞(rui)典的(de)3R裝置可實(shi)現(xian)快(kuai)速(su)精密定位。
b.混粉加工方法
在放電加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)液內混入粉末(mo)添加(jia)(jia)(jia)(jia)(jia)(jia)劑，以高速獲得光澤面(mian)(mian)的(de)(de)加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)方法(fa)稱之為混粉加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)。該方法(fa)主(zhu)要應用于復(fu)雜模(mo)具型(xing)腔(qiang)，尤其(qi)是不便于進行拋(pao)光作業的(de)(de)復(fu)雜曲面(mian)(mian)的(de)(de)精密加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)。可降低(di)零(ling)件(jian)表(biao)面(mian)(mian)粗(cu)糙度值，省去手工(gong)拋(pao)光工(gong)序，提高零(ling)件(jian)的(de)(de)使(shi)(shi)用性(xing)能（如(ru)壽命(ming)、耐磨(mo)性(xing)、耐腐蝕性(xing)、脫模(mo)性(xing)等）。混粉加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)技術(shu)的(de)(de)發(fa)展，使(shi)(shi)精密型(xing)腔(qiang)模(mo)具鏡面(mian)(mian)加(jia)(jia)(jia)(jia)(jia)(jia)工(gong)成為現實。
c.搖動加工方法
電火花加(jia)(jia)工復雜型腔時，可根據被加(jia)(jia)工部(bu)位的(de)搖動圖形、搖動量的(de)形狀及精度的(de)要求,選用(yong)電極不斷搖動的(de)方法(fa),獲得(de)側(ce)面(mian)與底(di)面(mian)更(geng)均勻的(de)表面(mian)粗糙度，更(geng)容易控制加(jia)(jia)工尺(chi)寸,實(shi)現小間隙放電條件下的(de)穩定加(jia)(jia)工。
d.多軸聯動加工方法
近年(nian)來，隨著模(mo)具(ju)工(gong)(gong)(gong)(gong)業和(he)IT技術的(de)(de)(de)發展，多(duo)軸(zhou)聯動電火(huo)花(hua)加(jia)(jia)工(gong)(gong)(gong)(gong)技術取得了(le)長足(zu)的(de)(de)(de)進步(bu)。模(mo)具(ju)企業采(cai)用多(duo)軸(zhou)聯動的(de)(de)(de)方法來提高加(jia)(jia)工(gong)(gong)(gong)(gong)性能，如清角(jiao)部位在(zai)加(jia)(jia)工(gong)(gong)(gong)(gong)可行(xing)的(de)(de)(de)情況下采(cai)用X、Y、Z三軸(zhou)聯動的(de)(de)(de)方法，即(ji)斜(xie)向(xiang)加(jia)(jia)工(gong)(gong)(gong)(gong)，避免了(le)因加(jia)(jia)工(gong)(gong)(gong)(gong)部位面積小而發生放電不穩定(ding)的(de)(de)(de)現(xian)象。模(mo)具(ju)潛伏式膠(jiao)口(kou)的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)(gong)通(tong)過對(dui)電極斜(xie)度裝夾(jia)定(ding)位的(de)(de)(de)設計(ji)，也可進行(xing)斜(xie)向(xiang)多(duo)軸(zhou)聯動加(jia)(jia)工(gong)(gong)(gong)(gong)。采(cai)用多(duo)軸(zhou)回轉系統(tong)與(yu)多(duo)種直線(xian)運動協調組合成多(duo)種復(fu)合運動方式，可適(shi)應不同(tong)種類工(gong)(gong)(gong)(gong)件的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)(gong)要求，擴(kuo)大數控(kong)電火(huo)花(hua)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)(gong)范圍，提高其在(zai)精密加(jia)(jia)工(gong)(gong)(gong)(gong)方面的(de)(de)(de)比較優勢和(he)技術效益(yi)。
5.精密加工技術的發展趨勢
面(mian)向21世紀的(de)精密加工技術的(de)發展(zhan)趨勢體現在以下幾個方面(mian)：
a.精密化
精密加工(gong)的核心主要體現在(zai)對(dui)尺寸精度、仿形精度、表(biao)面(mian)質(zhi)量的要求。當前精密電(dian)火花(hua)(hua)加工(gong)的精度已有(you)全面(mian)提高，尺寸加工(gong)要求可(ke)達±2-3μm、底(di)面(mian)拐(guai)角R值(zhi)可(ke)小(xiao)于(yu)0.03mm，最佳加工(gong)表(biao)面(mian)粗糙度可(ke)低(di)于(yu)Ra0.3μm。通過采用一系列先進加工(gong)技術和工(gong)藝方法，可(ke)達到(dao)鏡(jing)面(mian)加工(gong)效(xiao)果且能(neng)夠成(cheng)功地完成(cheng)微型接(jie)插件(jian)、IC塑封、手機(ji)、CD盒等高精密模具(ju)部位的電(dian)火花(hua)(hua)加工(gong)。
b.智能化
智(zhi)能化是而向21世(shi)紀制(zhi)造技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)的(de)(de)(de)發展(zhan)趨勢之一。智(zhi)能制(zhi)造技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)(IMT)是將人(ren)工(gong)(gong)(gong)(gong)(gong)(gong)智(zhi)能融入(ru)制(zhi)造過程(cheng)(cheng)的(de)(de)(de)各個環節，通過模(mo)擬人(ren)類(lei)專(zhuan)(zhuan)家的(de)(de)(de)智(zhi)能活動(dong)(dong)，取(qu)代或延(yan)伸(shen)制(zhi)造系(xi)統(tong)(tong)中(zhong)的(de)(de)(de)部分腦力(li)勞動(dong)(dong)，在(zai)制(zhi)造過程(cheng)(cheng)中(zhong)系(xi)統(tong)(tong)能自(zi)動(dong)(dong)監(jian)測其運行狀態，在(zai)受到外界(jie)干擾或內部激勵(li)能自(zi)動(dong)(dong)調(diao)整其參數，以達(da)到最(zui)(zui)佳狀態和(he)(he)具(ju)備自(zi)組(zu)織能力(li)。新(xin)型數控(kong)(kong)電火(huo)花機床采用(yong)了模(mo)糊控(kong)(kong)制(zhi)技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)和(he)(he)專(zhuan)(zhuan)家系(xi)統(tong)(tong)智(zhi)能控(kong)(kong)制(zhi)技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)。模(mo)糊控(kong)(kong)制(zhi)技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)是由計算機監(jian)測來(lai)判定電火(huo)花加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)間隙(xi)的(de)(de)(de)狀態，在(zai)保持穩(wen)定電弧的(de)(de)(de)范圍內自(zi)動(dong)(dong)選擇使(shi)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)效率達(da)到最(zui)(zui)高的(de)(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)條(tiao)(tiao)件；自(zi)動(dong)(dong)監(jian)控(kong)(kong)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)過程(cheng)(cheng)，實現最(zui)(zui)穩(wen)定的(de)(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)過程(cheng)(cheng)的(de)(de)(de)控(kong)(kong)制(zhi)技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)。采用(yong)人(ren)機對話方式(shi)的(de)(de)(de)專(zhuan)(zhuan)家系(xi)統(tong)(tong)，根據加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)的(de)(de)(de)條(tiao)(tiao)件、要(yao)求，合理輸入(ru)設定值(zhi)(zhi)后(hou)便能自(zi)動(dong)(dong)創建加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)程(cheng)(cheng)序，選用(yong)最(zui)(zui)佳加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)條(tiao)(tiao)件組(zu)合來(lai)進行加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)。在(zai)線自(zi)動(dong)(dong)監(jian)測、調(diao)整加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)過程(cheng)(cheng)，實現加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)過程(cheng)(cheng)的(de)(de)(de)最(zui)(zui)優化控(kong)(kong)制(zhi)。專(zhuan)(zhuan)家系(xi)統(tong)(tong)在(zai)檢(jian)測加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)條(tiao)(tiao)件時(shi)，只要(yao)輸入(ru)加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)形狀、電極與工(gong)(gong)(gong)(gong)(gong)(gong)件材質、加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)位置、目標粗糙度(du)值(zhi)(zhi)、電極縮放量、搖(yao)動(dong)(dong)方式(shi)、錐度(du)值(zhi)(zhi)等指(zhi)標，就可(ke)自(zi)動(dong)(dong)推算并配置最(zui)(zui)佳加(jia)(jia)(jia)(jia)工(gong)(gong)(gong)(gong)(gong)(gong)條(tiao)(tiao)件。專(zhuan)(zhuan)家系(xi)統(tong)(tong)智(zhi)能技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)的(de)(de)(de)應(ying)用(yong)使(shi)機床操(cao)作更(geng)容易，對操(cao)作人(ren)員的(de)(de)(de)技(ji)(ji)(ji)(ji)(ji)術(shu)(shu)水平要(yao)求更(geng)低。
c.自動化
自(zi)(zi)動(dong)化(hua)技術的(de)(de)(de)成功(gong)應(ying)用(yong)，不但提高(gao)了效率，保(bao)證了產(chan)品(pin)質(zhi)量，還可(ke)以(yi)代(dai)替人(ren)去(qu)完成危險場合的(de)(de)(de)工作(zuo)。對于批量較大(da)的(de)(de)(de)生(sheng)產(chan)自(zi)(zi)動(dong)化(hua)，可(ke)通(tong)過(guo)機床自(zi)(zi)動(dong)化(hua)改裝(zhuang)、應(ying)用(yong)自(zi)(zi)動(dong)機床、專(zhuan)用(yong)組(zu)合機床、自(zi)(zi)動(dong)生(sheng)產(chan)線來完成。小批量生(sheng)產(chan)自(zi)(zi)動(dong)化(hua)可(ke)通(tong)過(guo)NC，MC，CAM，FMS，CIM，IMS等(deng)來完成。在末(mo)來的(de)(de)(de)自(zi)(zi)動(dong)化(hua)技術實施過(guo)程中，將更(geng)加(jia)重視(shi)人(ren)在自(zi)(zi)動(dong)化(hua)系統中的(de)(de)(de)作(zuo)用(yong)。同時自(zi)(zi)動(dong)化(hua)開始面(mian)向中小型企業，以(yi)經濟(ji)實用(yong)為出發(fa)點，滿(man)足不斷發(fa)展(zhan)的(de)(de)(de)產(chan)品(pin)多樣化(hua)和個性化(hua)需(xu)要。數控電火(huo)花機床具(ju)備的(de)(de)(de)自(zi)(zi)動(dong)測(ce)量找(zhao)正(zheng)、自(zi)(zi)動(dong)定位、多工件的(de)(de)(de)連續加(jia)工等(deng)功(gong)能已較好(hao)地發(fa)揮(hui)了它的(de)(de)(de)自(zi)(zi)動(dong)化(hua)性能。自(zi)(zi)動(dong)操作(zuo)過(guo)程不需(xu)人(ren)工干預，可(ke)以(yi)提高(gao)加(jia)工精度、效率。目(mu)前最(zui)先(xian)進的(de)(de)(de)數控電火(huo)花機床在配(pei)有電極庫和標準電極夾具(ju)的(de)(de)(de)情況下，只要在加(jia)工前將電極裝(zhuang)入刀庫，編制好(hao)加(jia)工程序，整個電火(huo)花加(jia)工過(guo)程便能日以(yi)赴繼(ji)地自(zi)(zi)動(dong)運(yun)轉，幾乎(hu)無需(xu)人(ren)工操作(zuo)。機床的(de)(de)(de)自(zi)(zi)動(dong)化(hua)運(yun)轉降低了操作(zuo)人(ren)員的(de)(de)(de)勞動(dong)強度、提高(gao)生(sheng)產(chan)效率。
d.高效化
現(xian)代加(jia)(jia)工(gong)的(de)(de)要求為數控電(dian)火(huo)花加(jia)(jia)工(gong)技術提供了最佳的(de)(de)加(jia)(jia)工(gong)模(mo)式，即要求在保證加(jia)(jia)工(gong)精(jing)(jing)度(du)的(de)(de)前提下大(da)幅提高粗(cu)、精(jing)(jing)加(jia)(jia)工(gong)效(xiao)率。如手機外殼、家電(dian)制(zhi)品(pin)、電(dian)器用品(pin)、電(dian)子儀表等領域，都要求減(jian)少輔助(zhu)時(shi)間(如編程(cheng)時(shi)間、電(dian)極(ji)與工(gong)件(jian)(jian)定位(wei)時(shi)間等),同時(shi)又要降低粗(cu)糙度(du),從原(yuan)來的(de)(de)Ra0.8μm改進到Ra0.25μm，使放電(dian)后不必再進行手工(gong)拋光(guang)處理。這不但縮(suo)短了加(jia)(jia)工(gong)時(shi)間且省卻后處理的(de)(de)麻(ma)煩，同時(shi)提升了模(mo)具品(pin)質，使用粉末加(jia)(jia)工(gong)設備可(ke)達到要求。這就(jiu)需要增強(qiang)機床(chuang)的(de)(de)自動編程(cheng)功能，配置電(dian)極(ji)與工(gong)件(jian)(jian)定位(wei)的(de)(de)夾具、裝置。若(ruo)在大(da)工(gong)件(jian)(jian)的(de)(de)粗(cu)加(jia)(jia)工(gong)中選用石墨電(dian)極(ji)材料也是(shi)提高加(jia)(jia)工(gong)效(xiao)率的(de)(de)好方法。
e.信息化
信(xin)(xin)息(xi)(xi)、物質和能源是(shi)制(zhi)(zhi)造(zao)系統的(de)(de)三要(yao)(yao)素。隨著計算機、自(zi)動化(hua)與通訊(xun)網絡技術(shu)紅制(zhi)(zhi)造(zao)系統中(zhong)(zhong)的(de)(de)應(ying)用(yong)，信(xin)(xin)息(xi)(xi)的(de)(de)作(zuo)用(yong)越(yue)(yue)來越(yue)(yue)重要(yao)(yao)。產(chan)品制(zhi)(zhi)造(zao)過程中(zhong)(zhong)的(de)(de)信(xin)(xin)息(xi)(xi)投入，己成為(wei)決定產(chan)品成本的(de)(de)主要(yao)(yao)因素。制(zhi)(zhi)造(zao)過程的(de)(de)實質是(shi)對(dui)制(zhi)(zhi)造(zao)過程中(zhong)(zhong)各種信(xin)(xin)息(xi)(xi)資源的(de)(de)采集、輸入、加(jia)工和處理過程，最終形成的(de)(de)產(chan)品可看作(zuo)是(shi)信(xin)(xin)息(xi)(xi)的(de)(de)物質表(biao)現，因此可以(yi)(yi)把信(xin)(xin)息(xi)(xi)看作(zuo)是(shi)一種產(chan)業，包括在制(zhi)(zhi)造(zao)之中(zhong)(zhong)。為(wei)此一些企業開(kai)始利用(yong)網絡技術(shu)、計算機聯(lian)網、信(xin)(xin)息(xi)(xi)高速公路、衛星傳遞數(shu)據等實現異地(di)生產(chan)。使生產(chan)分散網絡化(hua)，以(yi)(yi)適應(ying)21世紀(ji)高柔性(xing)生產(chan)的(de)(de)需要(yao)(yao)。
f.柔性化
隨著科學技(ji)術(shu)的(de)(de)(de)(de)飛速發展和(he)人(ren)民生(sheng)(sheng)活(huo)水平不斷提高(gao)(gao)，促使產品更新(xin)換代的(de)(de)(de)(de)速度(du)不斷加快，這就要(yao)求現代企業必(bi)須具備一定(ding)的(de)(de)(de)(de)生(sheng)(sheng)產柔(rou)性來(lai)滿足(zu)市(shi)場多(duo)(duo)變(bian)的(de)(de)(de)(de)需要(yao)。所謂柔(rou)性，是(shi)指一個制造(zao)系統(tong)適應各種(zhong)生(sheng)(sheng)產條件變(bian)化(hua)的(de)(de)(de)(de)能力，它與系統(tong)方案、人(ren)員(yuan)和(he)設備有關。系統(tong)方案的(de)(de)(de)(de)柔(rou)性是(shi)指加工不同(tong)零件的(de)(de)(de)(de)自由度(du)。人(ren)員(yuan)柔(rou)性是(shi)指操作(zuo)人(ren)員(yuan)能保證加工任務，完成數(shu)量和(he)時間(jian)要(yao)求的(de)(de)(de)(de)適應能力。設備柔(rou)性是(shi)指機床(chuang)能在短(duan)期(qi)內適應新(xin)零件的(de)(de)(de)(de)加工能力。柔(rou)性制造(zao)自動化(hua)的(de)(de)(de)(de)形(xing)式很多(duo)(duo)，如美(mei)國提出(chu)的(de)(de)(de)(de)敏捷(jie)制造(zao)(AM)其主線就是(shi)高(gao)(gao)柔(rou)性生(sheng)(sheng)產。上海同(tong)濟大(da)學張曙教(jiao)授提出(chu)的(de)(de)(de)(de)獨立制造(zao)島(AMI)也是(shi)高(gao)(gao)柔(rou)性生(sheng)(sheng)產模式。
g.集成化
集成(cheng)(cheng)(cheng)(cheng)的(de)(de)作用(yong)是將原(yuan)來獨立運行(xing)(xing)的(de)(de)多個單元(yuan)系(xi)(xi)統(tong)集成(cheng)(cheng)(cheng)(cheng)一個能協(xie)調工作的(de)(de)和功(gong)能更強(qiang)的(de)(de)新系(xi)(xi)統(tong)。集成(cheng)(cheng)(cheng)(cheng)不是簡單的(de)(de)連接，是經過統(tong)一規劃設(she)計，分析原(yuan)單元(yuan)系(xi)(xi)統(tong)的(de)(de)作用(yong)和相互關(guan)系(xi)(xi)并進(jin)行(xing)(xing)優化(hua)重組而實(shi)現的(de)(de)。集成(cheng)(cheng)(cheng)(cheng)化(hua)的(de)(de)目的(de)(de)是實(shi)現制造企(qi)(qi)業的(de)(de)功(gong)能集成(cheng)(cheng)(cheng)(cheng)，功(gong)能集成(cheng)(cheng)(cheng)(cheng)要(yao)借助現代(dai)管理(li)技(ji)(ji)術(shu)(shu)、計算(suan)機技(ji)(ji)術(shu)(shu)、自動化(hua)技(ji)(ji)術(shu)(shu)和信息技(ji)(ji)術(shu)(shu)實(shi)現技(ji)(ji)術(shu)(shu)集成(cheng)(cheng)(cheng)(cheng)，同(tong)(tong)時還要(yao)強(qiang)調人(ren)(ren)的(de)(de)集成(cheng)(cheng)(cheng)(cheng)，由(you)于系(xi)(xi)統(tong)中(zhong)不可能沒有(you)人(ren)(ren)，系(xi)(xi)統(tong)運行(xing)(xing)的(de)(de)效果與企(qi)(qi)業經營思想、運行(xing)(xing)機制、管理(li)模式都與人(ren)(ren)有(you)關(guan)，在(zai)技(ji)(ji)術(shu)(shu)上集成(cheng)(cheng)(cheng)(cheng)的(de)(de)同(tong)(tong)時，還應強(qiang)調管理(li)與人(ren)(ren)的(de)(de)集成(cheng)(cheng)(cheng)(cheng)。集成(cheng)(cheng)(cheng)(cheng)化(hua)生產將成(cheng)(cheng)(cheng)(cheng)為面向21世紀占主導的(de)(de)生產方式。
三、超精密加工的技術應用與發展趨勢
超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)(jia)工(gong)(gong)(gong)是指亞(ya)微(wei)米(mi)級(尺寸誤(wu)差為0.3～0.03?m，表面(mian)(mian)粗糙(cao)度(du)(du)為Ra0.03～0.005?m)和(he)納米(mi)級(精(jing)(jing)(jing)(jing)度(du)(du)誤(wu)差為0.03?m，表面(mian)(mian)粗糙(cao)度(du)(du)小于 Ra0.005?m) 精(jing)(jing)(jing)(jing)度(du)(du)的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)。實(shi)現這些加(jia)(jia)工(gong)(gong)(gong)所采取的(de)(de)(de)工(gong)(gong)(gong)藝方(fang)法和(he)技術措施，則(ze)稱為超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)加(jia)(jia)工(gong)(gong)(gong)技術。加(jia)(jia)之測量技術、環境(jing)保障(zhang)和(he)材(cai)料等(deng)問題，人們(men)把(ba)這種(zhong)技術總(zong)稱為超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)工(gong)(gong)(gong)程。超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)(jia)工(gong)(gong)(gong)主要(yao)包括三個領域(yu)：超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)切(qie)削(xue)加(jia)(jia)工(gong)(gong)(gong)如(ru)金剛石刀具的(de)(de)(de)超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)切(qie)削(xue)，可加(jia)(jia)工(gong)(gong)(gong)各種(zhong)鏡面(mian)(mian)。它已成功地解決了用于激光核聚變系統和(he)天體望(wang)遠鏡的(de)(de)(de)大型拋物面(mian)(mian)鏡的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)。 超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)磨削(xue)和(he)研(yan)磨加(jia)(jia)工(gong)(gong)(gong)如(ru)高密(mi)(mi)度(du)(du)硬磁盤的(de)(de)(de)涂層表面(mian)(mian)加(jia)(jia)工(gong)(gong)(gong)和(he)大規(gui)模集成電(dian)路基片(pian)的(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)。超(chao)(chao)(chao)精(jing)(jing)(jing)(jing)密(mi)(mi)特種(zhong)加(jia)(jia)工(gong)(gong)(gong)如(ru)大規(gui)模集成電(dian)路芯片(pian)上的(de)(de)(de)圖形(xing)是用電(dian)子束、離子束刻蝕的(de)(de)(de)方(fang)法加(jia)(jia)工(gong)(gong)(gong)，線寬可達0.1?m。如(ru)用掃描(miao)隧道電(dian)子顯微(wei)鏡(STM)加(jia)(jia)工(gong)(gong)(gong)，線寬可達2～5nm。
a.超精密切削
超精密切(qie)削(xue)以SPDT技術(shu)(shu)開始，該技術(shu)(shu)以空(kong)氣軸承主軸、氣動滑板、高(gao)剛(gang)(gang)性、高(gao)精度工具(ju)、反饋控(kong)(kong)制和(he)環境溫度控(kong)(kong)制為支撐，可獲(huo)得納(na)米(mi)(mi)(mi)(mi)級表面粗糙度。多采用(yong)(yong)金剛(gang)(gang)石(shi)(shi)刀(dao)(dao)(dao)具(ju)銑(xian)削(xue)，廣泛用(yong)(yong)于銅的(de)平面和(he)非球面光學元件(jian)、有機玻(bo)璃(li)、塑料制品(如照相機的(de)塑料鏡(jing)片、隱形(xing)眼(yan)鏡(jing)鏡(jing)片等)、陶瓷及(ji)復合材料的(de)加(jia)工等。未來的(de)發(fa)展趨勢是利(li)用(yong)(yong)鍍膜(mo)技術(shu)(shu)來改善金剛(gang)(gang)石(shi)(shi)刀(dao)(dao)(dao)具(ju)在加(jia)工硬化鋼材時的(de)磨耗。此外(wai)，MEMS組件(jian)等微(wei)小零件(jian)的(de)加(jia)工需要微(wei)小刀(dao)(dao)(dao)具(ju)，目前微(wei)小刀(dao)(dao)(dao)具(ju)的(de)尺寸(cun)約可達(da)50～100 μm，但如果加(jia)工幾何(he)特征在亞微(wei)米(mi)(mi)(mi)(mi)甚至納(na)米(mi)(mi)(mi)(mi)級，刀(dao)(dao)(dao)具(ju)直徑(jing)必須再縮小，其發(fa)展趨勢是利(li)用(yong)(yong)納(na)米(mi)(mi)(mi)(mi)材料如納(na)米(mi)(mi)(mi)(mi)碳管來制作超小刀(dao)(dao)(dao)徑(jing)的(de)車刀(dao)(dao)(dao)或銑(xian)刀(dao)(dao)(dao)。
b.超精密磨削
超(chao)精密(mi)磨(mo)削(xue)(xue)是(shi)在一般精密(mi)磨(mo)削(xue)(xue)基(ji)礎上(shang)發展(zhan)起來的(de)一種鏡面(mian)(mian)磨(mo)削(xue)(xue)方法,其關鍵技術(shu)是(shi)金剛石砂輪的(de)修整,使磨(mo)粒具有微刃(ren)性和等(deng)高(gao)(gao)性。超(chao)精密(mi)磨(mo)削(xue)(xue)的(de)加(jia)工對象主要(yao)是(shi)脆硬的(de)金屬材(cai)料、半導體材(cai)料、陶瓷、玻(bo)璃等(deng)。磨(mo)削(xue)(xue)后(hou),被加(jia)工表面(mian)(mian)留(liu)下大量極微細的(de)磨(mo)削(xue)(xue)痕跡,殘留(liu)高(gao)(gao)度極小,加(jia)上(shang)微刃(ren)的(de)滑擠、摩擦、拋(pao)光(guang)作用(yong),可獲得(de)高(gao)(gao)精度和低表面(mian)(mian)粗糙(cao)度的(de)加(jia)工表面(mian)(mian)，當(dang)前(qian)超(chao)精密(mi)磨(mo)削(xue)(xue)能(neng)加(jia)工出圓(yuan)度0.01μm、尺寸精度0.1μm和表面(mian)(mian)粗糙(cao)度為Ra0.005μm的(de)圓(yuan)柱形零件。
c.超精密研磨
超精密(mi)研(yan)(yan)磨(mo)(mo)包括(kuo)機械研(yan)(yan)磨(mo)(mo)、化學機械研(yan)(yan)磨(mo)(mo)、浮動研(yan)(yan)磨(mo)(mo)、彈(dan)性發射加(jia)工以(yi)及磁力(li)研(yan)(yan)磨(mo)(mo)等加(jia)工方法。超精密(mi)研(yan)(yan)磨(mo)(mo)的(de)(de)關鍵條件是幾乎無振動的(de)(de)研(yan)(yan)磨(mo)(mo)運動、精密(mi)的(de)(de)溫度控制、潔(jie)凈的(de)(de)環境以(yi)及細小而(er)均(jun)勻(yun)的(de)(de)研(yan)(yan)磨(mo)(mo)劑。超精密(mi)研(yan)(yan)磨(mo)(mo)加(jia)工出的(de)(de)球面(mian)度達0.025μm,表面(mian)粗糙度Ra達0.003μm。
d.超精密特種加工
超(chao)精(jing)密特種(zhong)加(jia)(jia)(jia)(jia)(jia)工(gong)主要包括激(ji)光(guang)束加(jia)(jia)(jia)(jia)(jia)工(gong)、電(dian)(dian)(dian)(dian)子(zi)束加(jia)(jia)(jia)(jia)(jia)工(gong)、離子(zi)束加(jia)(jia)(jia)(jia)(jia)工(gong)、微(wei)(wei)(wei)細(xi)(xi)(xi)(xi)電(dian)(dian)(dian)(dian)火(huo)花加(jia)(jia)(jia)(jia)(jia)工(gong)、精(jing)細(xi)(xi)(xi)(xi)電(dian)(dian)(dian)(dian)解(jie)加(jia)(jia)(jia)(jia)(jia)工(gong)及電(dian)(dian)(dian)(dian)解(jie)研(yan)磨(mo)、超(chao)聲(sheng)電(dian)(dian)(dian)(dian)解(jie)加(jia)(jia)(jia)(jia)(jia)工(gong)、超(chao)聲(sheng)電(dian)(dian)(dian)(dian)解(jie)研(yan)磨(mo)、超(chao)聲(sheng)電(dian)(dian)(dian)(dian)火(huo)花等復合加(jia)(jia)(jia)(jia)(jia)工(gong)。激(ji)光(guang)、電(dian)(dian)(dian)(dian)子(zi)束加(jia)(jia)(jia)(jia)(jia)工(gong)可(ke)(ke)實(shi)現打孔、精(jing)密切(qie)割(ge)(ge)、成形(xing)切(qie)割(ge)(ge)、刻蝕、光(guang)刻曝光(guang)、加(jia)(jia)(jia)(jia)(jia)工(gong)激(ji)光(guang)防偽標志；離子(zi)束加(jia)(jia)(jia)(jia)(jia)工(gong)可(ke)(ke)實(shi)現原子(zi)、分(fen)子(zi)級的切(qie)削加(jia)(jia)(jia)(jia)(jia)工(gong)；利用微(wei)(wei)(wei)細(xi)(xi)(xi)(xi)放電(dian)(dian)(dian)(dian)加(jia)(jia)(jia)(jia)(jia)工(gong)可(ke)(ke)以實(shi)現極微(wei)(wei)(wei)細(xi)(xi)(xi)(xi)的金(jin)屬材料的去除,可(ke)(ke)加(jia)(jia)(jia)(jia)(jia)工(gong)微(wei)(wei)(wei)細(xi)(xi)(xi)(xi)軸、孔、窄(zhai)縫平面(mian)(mian)及曲面(mian)(mian)；精(jing)細(xi)(xi)(xi)(xi)電(dian)(dian)(dian)(dian)解(jie)加(jia)(jia)(jia)(jia)(jia)工(gong)可(ke)(ke)實(shi)現納(na)米(mi)級精(jing)度,且表面(mian)(mian)不(bu)會產生(sheng)加(jia)(jia)(jia)(jia)(jia)工(gong)應力(li),常用于鏡面(mian)(mian)拋光(guang)、鏡面(mian)(mian)減薄以及一些需要無(wu)應力(li)加(jia)(jia)(jia)(jia)(jia)工(gong)的場合。
超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)在國(guo)際上處于(yu)領先地位(wei)的(de)(de)(de)(de)國(guo)家(jia)(jia)有美(mei)國(guo)、英(ying)國(guo)和日本。這些國(guo)家(jia)(jia)的(de)(de)(de)(de)超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)不(bu)僅總體(ti)成套水平(ping)高(gao)，而且商品(pin)化(hua)的(de)(de)(de)(de)程度(du)也(ye)非(fei)常(chang)高(gao)。美(mei)國(guo)50年(nian)代(dai)未發展了(le)金剛石刀(dao)具的(de)(de)(de)(de)超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)切削技(ji)(ji)術(shu)(shu)(shu)，稱(cheng)為(wei)“SPDT技(ji)(ji)術(shu)(shu)(shu)”（Single Point Dia-mond Turning）或(huo)“微(wei)英(ying)寸技(ji)(ji)術(shu)(shu)(shu)”（1微(wei)英(ying)寸＝0.025μm），并(bing)發展了(le)相(xiang)(xiang)應的(de)(de)(de)(de)空(kong)氣軸承(cheng)主軸的(de)(de)(de)(de)超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)機床(chuang)(chuang)(chuang)，用于(yu)加(jia)工(gong)(gong)激(ji)光(guang)核聚變反射(she)鏡、戰術(shu)(shu)(shu)導(dao)彈及載(zai)人飛船用球面(mian)(mian)、非(fei)球面(mian)(mian)大(da)型零件(jian)(jian)(jian)等(deng)。英(ying)國(guo)克蘭菲爾(er)德技(ji)(ji)術(shu)(shu)(shu)學院所(suo)(suo)屬的(de)(de)(de)(de)克蘭菲爾(er)德精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)工(gong)(gong)程研(yan)究(jiu)所(suo)(suo)（簡稱(cheng)CUPE）是英(ying)國(guo)超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)水平(ping)的(de)(de)(de)(de)獨特代(dai)表(biao)。如CUPE生產的(de)(de)(de)(de)Nanocentre（納米加(jia)工(gong)(gong)中心）既可(ke)進行超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)車(che)削，又帶有磨頭，也(ye)可(ke)進行超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)磨削，加(jia)工(gong)(gong)工(gong)(gong)件(jian)(jian)(jian)的(de)(de)(de)(de)形狀精(jing)(jing)(jing)(jing)(jing)度(du)可(ke)達0.1μm，表(biao)面(mian)(mian)粗糙度(du)Ra<10 nm。日本對超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)的(de)(de)(de)(de)研(yan)究(jiu)相(xiang)(xiang)對于(yu)美(mei)、英(ying)來說起(qi)步較晚，但是當今世界上超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)發展最快的(de)(de)(de)(de)國(guo)家(jia)(jia)。北京(jing)機床(chuang)(chuang)(chuang)研(yan)究(jiu)所(suo)(suo)是國(guo)內進行超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)加(jia)工(gong)(gong)技(ji)(ji)術(shu)(shu)(shu)研(yan)究(jiu)的(de)(de)(de)(de)主要單位(wei)之一，研(yan)制出了(le)多種不(bu)同類型的(de)(de)(de)(de)超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)機床(chuang)(chuang)(chuang)、部件(jian)(jian)(jian)和相(xiang)(xiang)關的(de)(de)(de)(de)高(gao)精(jing)(jing)(jing)(jing)(jing)度(du)測(ce)試儀器等(deng)，如精(jing)(jing)(jing)(jing)(jing)度(du)達0.025μm的(de)(de)(de)(de)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)軸承(cheng)、JCS—027超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)車(che)床(chuang)(chuang)(chuang)、JCS—031超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)銑床(chuang)(chuang)(chuang)、JCS—035超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)車(che)床(chuang)(chuang)(chuang)、超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)車(che)床(chuang)(chuang)(chuang)數控(kong)系統、復印機感(gan)光(guang)鼓加(jia)工(gong)(gong)機床(chuang)(chuang)(chuang)、紅外大(da)功率(lv)激(ji)光(guang)反射(she)鏡、超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)振動－位(wei)移測(ce)微(wei)儀等(deng)，達到了(le)國(guo)內領先、國(guo)際先進水平(ping)。哈爾(er)濱工(gong)(gong)業大(da)學在金剛石超(chao)精(jing)(jing)(jing)(jing)(jing)密(mi)(mi)切削、金剛石刀(dao)具晶體(ti)定向和刃
磨(mo)、金剛石(shi)微(wei)粉(fen)砂(sha)(sha)輪電解在(zai)線修(xiu)整技術(shu)等(deng)方面進行(xing)了卓有成效的研究(jiu)。清(qing)華大(da)學(xue)在(zai)集(ji)成電路超(chao)(chao)精(jing)密加工(gong)(gong)設備、磁盤加工(gong)(gong)及檢測設備、微(wei)位移工(gong)(gong)作臺、超(chao)(chao)精(jing)密砂(sha)(sha)帶磨(mo)削(xue)和研拋、金剛石(shi)微(wei)粉(fen)砂(sha)(sha)輪超(chao)(chao)精(jing)密磨(mo)削(xue)、非圓截面超(chao)(chao)精(jing)密切削(xue)等(deng)方面進行(xing)了深入研究(jiu)，并有相(xiang)應(ying)產品問世。我(wo)國超(chao)(chao)精(jing)密加工(gong)(gong)技術(shu)與(yu)美(mei)日相(xiang)比，還有不小差(cha)距，特別是在(zai)大(da)型(xing)光(guang)學(xue)和非金屬材料的超(chao)(chao)精(jing)加工(gong)(gong)方面，在(zai)超(chao)(chao)精(jing)加工(gong)(gong)的效率和自(zi)動化技術(shu)方面差(cha)距尤(you)為明(ming)顯。
超精密加工將向高精度、高效率、大型化、微型化、智能化、工藝整合化、在線加工檢測一體化、綠色化等方向發展。
a.高精度、高效率。
隨著(zhu)科學技術的不斷進步(bu)，對精(jing)度、效率(lv)(lv)、質量的要求愈來(lai)愈高(gao),高(gao)精(jing)度與高(gao)效率(lv)(lv)成(cheng)為超精(jing)密(mi)(mi)加(jia)工(gong)永恒(heng)的主題。超精(jing)密(mi)(mi)切削(xue)(xue)、磨(mo)削(xue)(xue)技術能有(you)效提(ti)高(gao)加(jia)工(gong)效率(lv)(lv)，CMP、EEM技術能夠(gou)保(bao)證加(jia)工(gong)精(jing)度，而半固著(zhu)磨(mo)粒(li)加(jia)工(gong)方(fang)法及電解磁力研磨(mo)、磁流變磨(mo)料流加(jia)工(gong)等復合加(jia)工(gong)方(fang)法由于能兼(jian)顧效率(lv)(lv)與精(jing)度的加(jia)工(gong)方(fang)法，成(cheng)為超精(jing)密(mi)(mi)加(jia)工(gong)的趨勢。
b.大型化、微型化。
由于航(hang)天航(hang)空等(deng)(deng)技術的發(fa)(fa)展，大(da)型(xing)光電子器(qi)件(jian)要求大(da)型(xing)超(chao)精密(mi)加(jia)工設(she)備，如美國研制的加(jia)工直徑為2.4～4m的大(da)型(xing)光學器(qi)件(jian)超(chao)精密(mi)加(jia)工機床。同時隨著(zhu)微(wei)型(xing)機械電子、光電信息(xi)等(deng)(deng)領(ling)域的發(fa)(fa)展，超(chao)精密(mi)加(jia)工技術向微(wei)型(xing)化發(fa)(fa)展，如微(wei)型(xing)傳感器(qi)，微(wei)型(xing)驅動元件(jian)和動力(li)裝置、微(wei)型(xing)航(hang)空航(hang)天器(qi)件(jian)等(deng)(deng)都需要微(wei)型(xing)超(chao)精密(mi)加(jia)工設(she)備。
c.智能化。
以智能化(hua)設備降低加(jia)工(gong)(gong)結果對(dui)人工(gong)(gong)經驗(yan)的依賴性(xing)一直是制造領域(yu)追求的目標。加(jia)工(gong)(gong)設備的智能化(hua)程度(du)直接關系到加(jia)工(gong)(gong)的穩定性(xing)與加(jia)工(gong)(gong)效(xiao)率(lv)，這一點在超精密加(jia)工(gong)(gong)中體現更為明顯。
d. 工藝整合化。
當(dang)今企(qi)(qi)業(ye)(ye)間(jian)的(de)競爭趨(qu)(qu)于白熱化(hua)，高生產效率越(yue)(yue)來越(yue)(yue)成為企(qi)(qi)業(ye)(ye)賴以生存的(de)條件。在(zai)這樣的(de)背景(jing)下(xia)，出現了“以磨(mo)代(dai)研”甚至(zhi)“以磨(mo)代(dai)拋”的(de)呼(hu)聲(sheng)。另一(yi)方(fang)面，使用一(yi)臺設(she)備完成多種(zhong)加工(如車(che)削(xue)、鉆削(xue)、銑削(xue)、磨(mo)削(xue)、光整)的(de)趨(qu)(qu)勢越(yue)(yue)來越(yue)(yue)明顯。
e.在線加工檢測一體化。
由于(yu)超精密(mi)加工(gong)的(de)(de)精度(du)(du)很高，必(bi)須發展在線加工(gong)檢測一(yi)體化技(ji)術才能保證(zheng)產品(pin)質量和(he)提高生產率。同時(shi)由于(yu)加工(gong)設備本身的(de)(de)精度(du)(du)有時(shi)很難滿(man)足(zu)要(yao)求，采用(yong)在線檢測、工(gong)況監控(kong)和(he)誤差補償的(de)(de)方(fang)法可以提高精度(du)(du)，保證(zheng)加工(gong)質量的(de)(de)要(yao)求。
f.綠色化。
磨(mo)料(liao)加(jia)(jia)工(gong)(gong)(gong)是超(chao)精密加(jia)(jia)工(gong)(gong)(gong)的(de)(de)(de)(de)主要手段，磨(mo)料(liao)本身(shen)的(de)(de)(de)(de)制(zhi)造、磨(mo)料(liao)在加(jia)(jia)工(gong)(gong)(gong)中(zhong)(zhong)的(de)(de)(de)(de)消耗(hao)、加(jia)(jia)工(gong)(gong)(gong)中(zhong)(zhong)造成(cheng)的(de)(de)(de)(de)能(neng)源及材料(liao)的(de)(de)(de)(de)消耗(hao)、以(yi)及加(jia)(jia)工(gong)(gong)(gong)中(zhong)(zhong)大(da)量使(shi)用(yong)的(de)(de)(de)(de)加(jia)(jia)工(gong)(gong)(gong)液(ye)等對環(huan)境造成(cheng)了(le)極大(da)的(de)(de)(de)(de)負(fu)擔(dan)。我(wo)國(guo)是磨(mo)料(liao)、磨(mo)具(ju)產量及消耗(hao)的(de)(de)(de)(de)第一大(da)國(guo)，大(da)幅提高磨(mo)削加(jia)(jia)工(gong)(gong)(gong)的(de)(de)(de)(de)綠色(se)化(hua)程度(du)已成(cheng)為當(dang)務之急發達國(guo)家以(yi)及我(wo)國(guo)的(de)(de)(de)(de)臺灣地區均對半導體生(sheng)產廠家的(de)(de)(de)(de)廢(fei)液(ye)、廢(fei)氣排(pai)量及標準實施嚴格(ge)管(guan)制(zhi)，為此，各國(guo)研究人(ren)員對CMP加(jia)(jia)工(gong)(gong)(gong)產生(sheng)的(de)(de)(de)(de)廢(fei)液(ye)、廢(fei)氣回(hui)收處理展開了(le)研究。綠色(se)化(hua)的(de)(de)(de)(de)超(chao)精密加(jia)(jia)工(gong)(gong)(gong)技術在降低環(huan)境負(fu)擔(dan)的(de)(de)(de)(de)同(tong)時，提高了(le)自身(shen)的(de)(de)(de)(de)生(sheng)命力。
四、精密和超精密加工發展策略
精(jing)密(mi)(mi)(mi)(mi)和超精(jing)密(mi)(mi)(mi)(mi)加工(gong)經過數十年的(de)(de)努力，日趨成熟(shu)，不(bu)論是(shi)超精(jing)密(mi)(mi)(mi)(mi)機床、金(jin)剛石工(gong)具(ju)，還是(shi)超精(jing)密(mi)(mi)(mi)(mi)加工(gong)工(gong)藝(yi)已形(xing)成了(le)一(yi)整套(tao)完整的(de)(de)超精(jing)密(mi)(mi)(mi)(mi)制造技術系統，為推(tui)動(dong)機械制造向更高層次發(fa)展奠定了(le)基礎(chu)，現(xian)在正在向納米級精(jing)度或毫(hao)微米精(jing)度邁進(jin)，其前(qian)景十分(fen)令人鼓舞。隨著科學技術的(de)(de)飛速發(fa)展和市場競爭日益激烈，越(yue)來越(yue)多(duo)的(de)(de)制造業開始將大量的(de)(de)人力、財力和物力投入先(xian)進(jin)的(de)(de)制造技術和先(xian)進(jin)的(de)(de)制造模式的(de)(de)研究(jiu)和實施(shi)策略之中。
1.整合、創新思想的運用
精(jing)密(mi)、超精(jing)密(mi)加工技術是發展科技的(de)重要(yao)手段，所(suo)以受到世界各國的(de)廣泛重視，因此也就不斷(duan)地(di)獲得新(xin)的(de)成果，但是因為它的(de)要(yao)求都處在(zai)精(jing)度的(de)極限，傳統(tong)的(de)、單一的(de)技術往(wang)往(wang)很難突(tu)破，必須綜(zong)合(he)地(di)運(yun)用信息化技術，通過綜(zong)合(he)、分(fen)析，加以整(zheng)合(he)、重組，進一步滿足更高的(de)要(yao)求。
精(jing)密(mi)加工技(ji)(ji)術(shu)是(shi)一(yi)項系統工程，它集(ji)機床(chuang)、工具、計量、數控、材(cai)料、環境控制等成果于一(yi)體，針對(dui)不(bu)同(tong)的(de)加工對(dui)象(xiang)，不(bu)同(tong)的(de)設計要求，綜合地加以利(li)用(yong)。超(chao)(chao)精(jing)密(mi)加工技(ji)(ji)術(shu)也都是(shi)在其有(you)關的(de)各項技(ji)(ji)術(shu)支撐(cheng)的(de)條(tiao)件(jian)下，逐步發展(zhan)起(qi)來的(de)，同(tong)時又往往取各項技(ji)(ji)術(shu)的(de)嶄(zhan)新(xin)成果來加以充實、提高。超(chao)(chao)精(jing)密(mi)加工技(ji)(ji)術(shu)每(mei)前(qian)(qian)進一(yi)步，都離不(bu)開創新(xin)，這(zhe)是(shi)由超(chao)(chao)精(jing)密(mi)加工技(ji)(ji)術(shu)所處的(de)位(wei)置決(jue)定的(de)，因為這(zhe)門技(ji)(ji)術(shu)始終處在發展(zhan)的(de)前(qian)(qian)沿(yan)。面對(dui)飛速發展(zhan)的(de)需求就決(jue)定了它必須創新(xin)。
2.先進的制造模式應用
制造模式是指企業體制、經(jing)營(ying)、管理、生產組織和技(ji)術系(xi)統(tong)的形態和運作模式。
a.敏捷制造
美(mei)國通用汽車公司與里(li)海大學于(yu)1988年提出(chu)了敏捷制造(AM)，AM是在不可預測(ce)的(de)(de)持續變化(hua)的(de)(de)競爭環(huan)境(jing)中取得繁榮成(cheng)長(chang)，并具有能(neng)對客戶需求的(de)(de)產品和服務驅(qu)動市場作(zuo)出(chu)迅速響(xiang)應的(de)(de)生產模(mo)式。AM的(de)(de)特(te)征是：
①企(qi)業(ye)間聯(lian)作集(ji)成。充分(fen)發揮各(ge)企(qi)業(ye)的長處，針對限定市場的目(mu)標要求共同合(he)作完(wan)成任務。
②具有高度的(de)制造(zao)(zao)柔(rou)性。制造(zao)(zao)柔(rou)性是指(zhi)制造(zao)(zao)企業對市場要求(qiu)迅速轉產和能實現產品(pin)多品(pin)種變批量的(de)快速制造(zao)(zao)。
③充(chong)分(fen)發(fa)揮人(ren)的(de)作用，不斷提高企業職工素質和教育水平，優化人(ren)機功能(neng)分(fen)配(pei)。
b.虛擬制造
虛擬(ni)(ni)制造(VM)是國(guo)(guo)際上提出的(de)新概(gai)念。VM與AM聯(lian)系密(mi)切(qie)。VM的(de)特征是：當市(shi)場新的(de)機遇出現時，組織幾(ji)個有(you)關公(gong)(gong)(gong)(gong)司(si)(si)聯(lian)作(zuo)，把不(bu)同(tong)的(de)公(gong)(gong)(gong)(gong)司(si)(si)，不(bu)同(tong)地點(dian)的(de)工(gong)(gong)廠(chang)或車間(jian)重新組織協調工(gong)(gong)作(zuo)。在運行之前必(bi)須(xu)分析組合(he)是否(fou)最優，能否(fou)協調運行，以及(ji)投產后(hou)的(de)效益和(he)風險(xian)進(jin)行評估(gu)，這種(zhong)聯(lian)作(zuo)公(gong)(gong)(gong)(gong)司(si)(si)稱虛擬(ni)(ni)公(gong)(gong)(gong)(gong)司(si)(si)。虛擬(ni)(ni)公(gong)(gong)(gong)(gong)司(si)(si)通過虛擬(ni)(ni)制造系統運行。因此研究開(kai)發虛擬(ni)(ni)制造技術(VMT)和(he)虛擬(ni)(ni)制造系統(VMS)意義重大，美國(guo)(guo)稱AM為2l世紀制造業發展(zhan)戰略。
c.集成制造
美(mei)國(guo)哈林頓博(bo)士在(zai)《計(ji)(ji)(ji)算機和(he)集(ji)成(cheng)制(zhi)造(zao)》一書中提出計(ji)(ji)(ji)算機和(he)集(ji)成(cheng)制(zhi)造(zao)(CIM)的概念。集(ji)成(cheng)制(zhi)造(zao)的核心內容是(shi)(shi)(shi)(shi)：制(zhi)造(zao)企(qi)業從市場(chang)預測、產品設(she)計(ji)(ji)(ji)、加工制(zhi)造(zao)、經營管(guan)理克至售后服務(wu)是(shi)(shi)(shi)(shi)一個不可分割(ge)的整體，需要(yao)(yao)統籌(chou)考(kao)慮。整個制(zhi)造(zao)過程的實質(zhi)是(shi)(shi)(shi)(shi)信息采集(ji)、傳遞(di)和(he)加工過程，最(zui)終生(sheng)產的產品可看作是(shi)(shi)(shi)(shi)信息的物(wu)質(zhi)表現。集(ji)成(cheng)是(shi)(shi)(shi)(shi)CIM的核心，這種集(ji)成(cheng)不僅是(shi)(shi)(shi)(shi)物(wu)的集(ji)成(cheng)，更主要(yao)(yao)的是(shi)(shi)(shi)(shi)以信息集(ji)成(cheng)為特征的技術集(ji)成(cheng)和(he)功能(neng)集(ji)成(cheng)，計(ji)(ji)(ji)算機是(shi)(shi)(shi)(shi)集(ji)成(cheng)的工具，計(ji)(ji)(ji)算機和(he)輔助各單元技術是(shi)(shi)(shi)(shi)集(ji)成(cheng)的基(ji)礎，信息交換是(shi)(shi)(shi)(shi)橋梁，信息共享是(shi)(shi)(shi)(shi)關(guan)鍵(jian)。集(ji)成(cheng)的目的在(zai)于制(zhi)造(zao)企(qi)業組織(zhi)結(jie)構和(he)運行方式的合理化和(he)最(zui)優化，以提高(gao)今業對市場(chang)變化的動(dong)態響應速度，并追求最(zui)高(gao)整體效益和(he)長期效益。
d.智能制造
智(zhi)(zhi)(zhi)能(neng)(neng)制造(zao)(zao)(IM)是(shi)美(mei)國出(chu)版研究IM和(he)IMS書籍中首先提出(chu)的(de)(de)。它的(de)(de)特征是(shi)：在制造(zao)(zao)工(gong)業的(de)(de)各個環節的(de)(de)高度柔性與(yu)高度集成的(de)(de)方(fang)式，通過(guo)計算(suan)機和(he)模擬人(ren)類(lei)專家(jia)的(de)(de)智(zhi)(zhi)(zhi)能(neng)(neng)活動，進(jin)行分析、判(pan)斷、推理、構思和(he)決策，旨在取代或延伸制造(zao)(zao)環境中人(ren)的(de)(de)部分腦力(li)勞動，并(bing)對(dui)人(ren)類(lei)專家(jia)的(de)(de)制造(zao)(zao)智(zhi)(zhi)(zhi)能(neng)(neng)進(jin)行收集、存儲、完善、共享(xiang)、繼承與(yu)發(fa)展。制造(zao)(zao)智(zhi)(zhi)(zhi)能(neng)(neng)的(de)(de)目(mu)的(de)(de)是(shi)：通過(guo)集成知識工(gong)程、制造(zao)(zao)軟件系統、機器(qi)人(ren)視覺和(he)機器(qi)人(ren)控制對(dui)制造(zao)(zao)工(gong)人(ren)的(de)(de)技能(neng)(neng)與(yu)人(ren)類(lei)專家(jia)知識進(jin)行建模，以使智(zhi)(zhi)(zhi)能(neng)(neng)機器(qi)能(neng)(neng)夠在沒(mei)有人(ren)干(gan)預的(de)(de)情況下進(jin)行小批(pi)量生產。
e.綠色制造
綠色制造又稱環(huan)境(jing)(jing)意識制造和面向(xiang)環(huan)境(jing)(jing)的(de)制造等(deng)。即(ji)綜合考慮環(huan)境(jing)(jing)影響和資源消耗的(de)現代制造模式(shi)。其目標是使得(de)產品從(cong)設(she)計、制造、包(bao)裝、運(yun)輸、使用到報廢處理的(de)全生命(ming)周期中，廢棄物(wu)和有害排放(fang)物(wu)最(zui)(zui)小，對環(huan)境(jing)(jing)的(de)負面影響最(zui)(zui)小，對健(jian)康無害，資源利用率最(zui)(zui)高，使企(qi)業經濟效(xiao)益和社會效(xiao)益更高。
結束語
精(jing)密和(he)超精(jing)密加工，是現代(dai)機(ji)械制(zhi)造業(ye)最主要的(de)發(fa)展(zhan)(zhan)方向(xiang)之一,在提高機(ji)電產品的(de)性能、質量(liang)和(he)發(fa)展(zhan)(zhan)高新技(ji)術(shu)中(zhong)(zhong)起著(zhu)至關重要的(de)作用，并(bing)且已(yi)成為在國際競爭(zheng)中(zhong)(zhong)取得成功(gong)的(de)關鍵技(ji)術(shu)。我國的(de)制(zhi)造業(ye)發(fa)展(zhan)(zhan)已(yi)進(jin)入(ru)了高速(su)發(fa)展(zhan)(zhan)階段，中(zhong)(zhong)國民營(ying)企(qi)(qi)業(ye)已(yi)具備(bei)足夠的(de)經濟實力來使企(qi)(qi)業(ye)邁向(xiang)現代(dai)化(hua)(hua)，先(xian)進(jin)設備(bei)的(de)引進(jin)和(he)大量(liang)專業(ye)人(ren)才的(de)涌(yong)入(ru)使許多沿海地區的(de)制(zhi)造業(ye)水平迅速(su)提高。隨著(zhu)國家決策的(de)科學化(hua)(hua)、民主化(hua)(hua)進(jin)程不斷深入(ru)，相信我國的(de)制(zhi)造業(ye)會更快速(su)、更健康地發(fa)展(zhan)(zhan)。